Helsingin yliopisto

 

Helsingin yliopiston verkkojulkaisut

University of Helsinki, Helsinki 2005

Atomic Layer Deposition of TaN, NbN, and MoN Films for Cu Metallizations

Petra AlÚn

Academic Dissertation, June 2005.
University of Helsinki, Faculty of Science, Department of Chemistry, Laboratory of Inorganic Chemistry.

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Last updated 01.06.2005/PA

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