Helsingin yliopisto

 

Helsingin yliopiston verkkojulkaisut

University of Helsinki, Helsinki 2001

Atomic Layer Deposition of Metal and Transition Metal Nitride Thin Films and In Situ Mass Spectrometry Studies

Marika Juppo

Academic Dissertation, December 2001.
University of Helsinki, Faculty of Science, Department of Chemistry, Laboratory of Inorganic Chemistry.

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© University of Helsinki 2001

Viimeksi päivitetty 12.11.2001 /MJ