Helsingin yliopisto


Helsingin yliopiston verkkojulkaisut

University of Helsinki, Helsinki 2001

Atomic Layer Deposition of Metal and Transition Metal Nitride Thin Films and In Situ Mass Spectrometry Studies

Marika Juppo

Academic Dissertation, December 2001.
University of Helsinki, Faculty of Science, Department of Chemistry, Laboratory of Inorganic Chemistry.

  1. As a PDF file (ISBN 952-10-0221-2) - 277 Kb

This publication is copyrighted. You may download, display and print it for Your own personal use. Commercial use is prohibited.

© University of Helsinki 2001

Viimeksi päivitetty 12.11.2001 /MJ