Helsingin yliopisto

 

Helsingin yliopiston verkkojulkaisut

University of Helsinki, Helsinki 2006

Radical Enhanced Atomic Layer Deposition of Metals and Oxides

Antti Niskanen

Doctoral dissertation, November 2006.
University of Helsinki, Faculty of Science, Department of Chemistry.

  1. As a PDF file (ISBN 952-10-3395-9) - 2062 kB
  2. Abstract
  3. Tiivistelmä

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Last updated 31.10.2006

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