Helsingin yliopisto


Helsingin yliopiston verkkojulkaisut

University of Helsinki, Helsinki 2002

Atomic Layer Deposition of High Permittivity Oxides: Film Growth and In Situ Studies

Antti Rahtu

Academic Dissertation, September 2002.
University of Helsinki, Department of Chemistry, Faculty of Science.

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Viimeksi päivitetty 09.09.2002/AR

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