University of Helsinki, Helsinki 2002
Atomic Layer Deposition of High Permittivity Oxides: Film Growth and In Situ Studies
Antti Rahtu
Academic Dissertation, September 2002.
University of Helsinki, Department of Chemistry, Faculty of Science.
- As a PDF file (ISBN 952-10-0646-3) - 510 kB
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Viimeksi päivitetty 09.09.2002/AR