Browsing by Subject "fluoride"

Rare earth trifluorides are a group of 17 compounds which have intriguing optical, electrical, and luminescence properties. However, realizing these properties in the form of thin films has had its challenges. Overall, research on the subject has been scarce. On the other hand, some rare earth fluoride thin films have found usage in for example optical filters in ultraviolet and infrared wavelengths.In this thesis a review of rare earth fluoride thin films and their deposition methods is made. Potential of the rare earth fluoride thin films is explored starting from the bulk properties of the rare earth fluorides which are compared to the published results for thin films. Additionally, the current status, challenges, and potential of rare earth fluoride thin films is discussed in the light of different deposition methods and their differences. In the experimental part of the thesis, deposition of holmium fluoride thin film by atomic layer deposition (ALD) is studied alongside its properties. In the HoF3 deposition, Ho(thd)3 (thd = 2,2,6,6- tetramethyl-3,5-heptanedionato) and niobium pentafluoride were used as precursors, latter of which was used as an ALD fluoride precursor for the first time.